What is the difference between a positive and negative photoresist in microlithography method?

What is the difference between a positive and negative photoresist in microlithography method?

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The difference is that light affects them in opposite ways, making one more soluble and the other less soluble. Here's a

more thorough explanation.

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Positive photoresist allows the acid to etch away the background leaving the image untouched (positive image)



Negative photoresist allows the acid to etch away the image leaving the background untouched (negative image)

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